Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 64; Iss. 1-4
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A quantitative study of copper segregation in silicon under oxygen ion beam bombardment using SIMS
J.A. Kilner, D.S. McPhail, S.D. LittlewoodVolume:
64
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(92)95547-5
File:
PDF, 406 KB
english, 1992