Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 64; Iss. 1-4
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Shallow depth profiles of arsenic and boron in CoSi2 measured by secondary ion mass spectrometry
B. Mohadjeri, B.G. SvenssonVolume:
64
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(92)95552-3
File:
PDF, 428 KB
english, 1992