Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 64; Iss. 1-4
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NRA and XPS characterizations of layers formed by rapid thermal nitridation of thin SiO2 films
J-J. Ganem, S. Rigo, I. Trimaille, G-N. Lu, G. Dufour, H. RouletVolume:
64
Year:
1992
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(92)95570-h
File:
PDF, 435 KB
english, 1992