NRA and RBS analyses of silicon, aluminium and iron nitride...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1992 Vol. 64; Iss. 1-4

NRA and RBS analyses of silicon, aluminium and iron nitride thin films

F.C. Stedile, R. Hübler, I.J.R. Baumvol, W.H. Schreiner, F.L. Freire Jr.
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Volume:
64
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(92)95572-9
File:
PDF, 347 KB
english, 1992
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