Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 64; Iss. 1-4
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Nuclear reaction analyses of boron nitride films deposited by ion beam based techniques
D. Bouchier, A. BosseboeufVolume:
64
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(92)95574-b
File:
PDF, 508 KB
english, 1992