Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 64; Iss. 1-4
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Lateral growth of cobalt suicide observed by an MeV helium ion microprobe
A. Kinomura, M. Takai, S. Namba, H. Ryssel, P.H. Tsien, E. Burte, M. Satou, A. ChayaharaVolume:
64
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(92)95575-c
File:
PDF, 421 KB
english, 1992