Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 64; Iss. 1-4
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Various advanced capabilities of the RBS setup at IMEC
B. Brijs, W. De Coster, W. VandervorstVolume:
64
Year:
1992
Language:
english
Pages:
7
DOI:
10.1016/0168-583x(92)95586-g
File:
PDF, 782 KB
english, 1992