Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 67; Iss. 1-4
The ion charge state fluctuation effect during high energy ion implantation: Monte Carlo simulation
A.F. Burenkov, F.F. Komarov, S.A. FedotovVolume:
67
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(92)95766-k
File:
PDF, 273 KB
english, 1992