Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 67; Iss. 1-4
Channeling of B ions in silicon
M. Vos, C. Wu, I.V. Mitchell, P.J.M. SmuldersVolume:
67
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(92)95806-3
File:
PDF, 315 KB
english, 1992