Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 67; Iss. 1-4
Atomic collisions in surface chemistry and film deposition
J.W. Rabalais, D. MartonVolume:
67
Year:
1992
Language:
english
Pages:
9
DOI:
10.1016/0168-583x(92)95819-d
File:
PDF, 655 KB
english, 1992