Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 67; Iss. 1-4
Kinetics of ion beam nitridation (IBN) of Si and of MBE-grown Ge and SixGe1−x alloys: The role of ion energy, ion dose and substrate temperature
O.C. Hellman, N. Herbots, O. VancauwenbergheVolume:
67
Year:
1992
Language:
english
Pages:
7
DOI:
10.1016/0168-583x(92)95821-8
File:
PDF, 483 KB
english, 1992