Effect of sputter voltage on the electrical characteristics...

Effect of sputter voltage on the electrical characteristics of argon ion sputtered n-type GaAs

F.D. Auret, G. Myburg, S.A. Goodman, L.J. Bredell, W.O. Barnard
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Volume:
67
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(92)95842-f
File:
PDF, 385 KB
english, 1992
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