Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 67; Iss. 1-4
Effect of sputter voltage on the electrical characteristics of argon ion sputtered n-type GaAs
F.D. Auret, G. Myburg, S.A. Goodman, L.J. Bredell, W.O. BarnardVolume:
67
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(92)95842-f
File:
PDF, 385 KB
english, 1992