Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 67; Iss. 1-4
A nuclear reaction analysis study of boron implanted at low energy into silicon
R. Valizadeh, G. FarrellVolume:
67
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(92)95843-g
File:
PDF, 240 KB
english, 1992