Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 67; Iss. 1-4
Diffusion of group III-, IV- and V-elements in SI under ion irradiation
P. Krause, H. Kerkow, K. Holldack, R. WedellVolume:
67
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(92)95848-l
File:
PDF, 241 KB
english, 1992