Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 67; Iss. 1-4
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Particle reflection and re-implantation during grazing incidence implantation of As+ and B+ into silicon
M. Posselt, L. Drechsler, R. Grötzschel, R. Klabes, G. Otto, A. Schöneich, E. Sobeslavsky, H. SyhreVolume:
67
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(92)95849-m
File:
PDF, 321 KB
english, 1992