Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 67; Iss. 1-4
The behavior of high energy multiple P+ (0.5–7.5 MeV) and B+ implanted silicon and rapid thermal annealing
Wu Yuguang, Zhang Tonghe, Luo Yan, Sun GuiruVolume:
67
Year:
1992
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(92)95853-j
File:
PDF, 273 KB
english, 1992