Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 67; Iss. 1-4
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Amorphous-crystal boundary motion and impurity redistribution during keV Ne+ ion irradiation of Si
Sukirno, B. Zeroual, G. Carter, G.A. StephensVolume:
67
Year:
1992
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(92)95854-k
File:
PDF, 414 KB
english, 1992