Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 67; Iss. 1-4
The effect of parameter choice on predicted depth resolution in sputter profiling
G. Carter, M.J. Nobes, I.V. Katardjiev, J.J. Jiménez-Rodríguez, I. Abril, A. Gras-MartíVolume:
67
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(92)95857-n
File:
PDF, 382 KB
english, 1992