Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 67; Iss. 1-4
Interface width dependence on sample temperature during Auger sputter depth profiling of Cr/Ni multilayered thin films
N. Tanović, L. Tanović, J. FineVolume:
67
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(92)95858-o
File:
PDF, 289 KB
english, 1992