On some factors limiting depth resolution during SIMS...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1992 Vol. 67; Iss. 1-4

On some factors limiting depth resolution during SIMS profiling

P.C. Zalm, C.J. Vriezema
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Volume:
67
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(92)95859-p
File:
PDF, 428 KB
english, 1992
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