Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 67; Iss. 1-4
Ion beam induced mixing in Pd thin films on silicon
N. Bibić, M. Milosavljević, D. Peruško, Y. Serruys, C. JeynesVolume:
67
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(92)95860-t
File:
PDF, 290 KB
english, 1992