Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 67; Iss. 1-4
Sputtering of graphite by argon ions
I.M. Fayazov, E.S. Mashkova, V.A. Molchanov, A.V. Sidorov, A.I. Tolmachev, W. EcksteinVolume:
67
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(92)95865-o
File:
PDF, 230 KB
english, 1992