Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 67; Iss. 1-4
A cellular automata simulation study of surface roughening resulting from multi-atom etch pit generation during sputtering
Y.S. Toh, M.J. Nobes, G. CarterVolume:
67
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(92)95878-u
File:
PDF, 242 KB
english, 1992