Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 66; Iss. 3
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Heterogeneous processes of new phase growth in the system of various sinks: ion-beam synthesis of silicon oxynitride
M.Yu. Barabanenkov, A.F. Borun, A.B. DanilinVolume:
66
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(92)95996-5
File:
PDF, 329 KB
english, 1992