Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 68; Iss. 1-4
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Ion implantation as an efficient surface treatment
Chr.A. StraedeVolume:
68
Year:
1992
Language:
english
Pages:
9
DOI:
10.1016/0168-583x(92)96109-c
File:
PDF, 751 KB
english, 1992