Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 68; Iss. 1-4
Radiation-induced diffusion during ion implantation
H. Kerkow, K. Holldack, A. MertensVolume:
68
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(92)96110-k
File:
PDF, 303 KB
english, 1992