Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 68; Iss. 1-4
![](/img/cover-not-exists.png)
Influence of implantation defects on the nucleation and growth of CoSi2 precipitates
A. Witzmann, S. Schippel, A. ZentgrafVolume:
68
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(92)96119-j
File:
PDF, 312 KB
english, 1992