Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 80-81; Iss. part-P2
Segregation of dopants in ion beam synthesised CoSi2 layers
Karen J. Reeson, Tim D. Hunt, Russell M. Gwilliam, Brian J. Sealy, C. Douglas Meekison, G. Roger BookerVolume:
80-81
Year:
1993
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(93)90696-4
File:
PDF, 299 KB
english, 1993