Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 80-81; Iss. part-P2
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Concentration profiles of high dose MeV oxygen implanted silicon
K. Touhouche, J. Jackman, A. YelonVolume:
80-81
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(93)90697-5
File:
PDF, 347 KB
english, 1993