Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 80-81; Iss. part-P2
Focused ion beam lithography
John MelngailisVolume:
80-81
Year:
1993
Language:
english
Pages:
10
DOI:
10.1016/0168-583x(93)90781-z
File:
PDF, 629 KB
english, 1993