Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 80-81; Iss. part-P2
Energy spread of a focused ion beam system with a supertip
Th. Maisch, Ch. Wilbertz, Th. Miller, S. KalbitzerVolume:
80-81
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(93)90783-3
File:
PDF, 306 KB
english, 1993