Maskless fabrication of contact vias by focused MeV heavy...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1993 Vol. 80-81; Iss. part-P2

Maskless fabrication of contact vias by focused MeV heavy ion beam

Yoshiaki Mokuno, Yuji Horino, Atsushi Kinomura, Akiyoshi Chayahara, Masato Kiuchi, Shigeharu Tamura, Kanenaga Fujii, Mikio Takai
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
80-81
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(93)90784-4
File:
PDF, 234 KB
english, 1993
Conversion to is in progress
Conversion to is failed