Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 74; Iss. 1-2
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Positron annihilation study of P implanted Si
P. Asoka-Kumar, P. Sferlazzo, H.L. Au, K.G. LynnVolume:
74
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(93)95020-6
File:
PDF, 616 KB
english, 1993