Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 74; Iss. 1-2
Damage depth profiles for high energy ion implanted silicon
Tohru Hara, Takeshi Muraki, Masataka Sakurai, Satoru Takeda, Inoue Morio, Fuji ShinjiVolume:
74
Year:
1993
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(93)95041-3
File:
PDF, 558 KB
english, 1993