Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 74; Iss. 1-2
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Improved gauge capability for ion implant monitors using temperature compensation for resistivity measurements
Walter H. Johnson, Chester L. Mallory, W. Andrew Keenan, Gil Yetter, Dennis KamenitsaVolume:
74
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(93)95049-b
File:
PDF, 497 KB
english, 1993