Modification of time dependence in thermal wave signal from...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1993 Vol. 74; Iss. 1-2

Modification of time dependence in thermal wave signal from ion implanted wafers

N.O. Pearce, Z. Bokharey, D. Kamenitsa, R. Simonton, N. Tripsas, B. Mehrotra
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Volume:
74
Year:
1993
Language:
english
Pages:
3
DOI:
10.1016/0168-583x(93)95057-c
File:
PDF, 319 KB
english, 1993
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