Damage and its rapid thermal annealing kinetics in Ar+ ion...

Damage and its rapid thermal annealing kinetics in Ar+ ion implanted Cz silicon

S. Hahn, T. Hara, T. Maekawa, N. Satoh, Y.-K. Kwon, K.-I. Kim, Y.-H. Bae, W.-J. Chung, E.K. McIntyre, W.L. Smith, L. Larson, R. Meinecke
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Volume:
74
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(93)95060-i
File:
PDF, 402 KB
english, 1993
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