Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 74; Iss. 1-2
Damage and its rapid thermal annealing kinetics in Ar+ ion implanted Cz silicon
S. Hahn, T. Hara, T. Maekawa, N. Satoh, Y.-K. Kwon, K.-I. Kim, Y.-H. Bae, W.-J. Chung, E.K. McIntyre, W.L. Smith, L. Larson, R. MeineckeVolume:
74
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(93)95060-i
File:
PDF, 402 KB
english, 1993