Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 74; Iss. 1-2
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Charging studies using the CHARM2 wafer surface charging monitor
W. Lukaszek, W. Dixon, E. Quek, W. Weisenberger, Ho SungVolume:
74
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(93)95065-d
File:
PDF, 655 KB
english, 1993