Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 74; Iss. 1-2
Wafer charging monitored by high frequency and quasi-static C−V measurements
Bill En, Nathan W. CheungVolume:
74
Year:
1993
Language:
english
Pages:
3
DOI:
10.1016/0168-583x(93)95067-f
File:
PDF, 288 KB
english, 1993