Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 74; Iss. 1-2
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Irradiation effects of gas-cluster CO2 ion beams on Si
I. Yamada, G.H. Takaoka, M.I. Current, Y. Yamashita, M. IshiiVolume:
74
Year:
1993
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(93)95073-e
File:
PDF, 495 KB
english, 1993