Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 79; Iss. 1-4
Surface modification with gas cluster ion beams
I. Yamada, W.L. Brown, J.A. Norhby, M. SosnowskiVolume:
79
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(93)95330-8
File:
PDF, 434 KB
english, 1993