Hydrogen depth profiling of SiNx films by the detection of...

Hydrogen depth profiling of SiNx films by the detection of recoiled protons

Niu Huan, Wu Shiu-Chin, Huang Sheng-Liang, Lin Jandel, Deng Ray-Chern
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Volume:
79
Year:
1993
Language:
english
Pages:
3
DOI:
10.1016/0168-583x(93)95408-w
File:
PDF, 235 KB
english, 1993
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