Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 79; Iss. 1-4
Hydrogen depth profiling of SiNx films by the detection of recoiled protons
Niu Huan, Wu Shiu-Chin, Huang Sheng-Liang, Lin Jandel, Deng Ray-ChernVolume:
79
Year:
1993
Language:
english
Pages:
3
DOI:
10.1016/0168-583x(93)95408-w
File:
PDF, 235 KB
english, 1993