A new high energy implantation facility for materials...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1993 Vol. 79; Iss. 1-4

A new high energy implantation facility for materials research at the CRN, Strasbourg

J.P. Stoquert, J.J. Grob, D. Muller, P. Rohr, P. Siffert
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Volume:
79
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(93)95438-b
File:
PDF, 410 KB
english, 1993
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