Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 79; Iss. 1-4
Investigations of carbon implanted silicon
D. Fröse, D. Kollewe, W. von MünchVolume:
79
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(93)95439-c
File:
PDF, 445 KB
english, 1993