Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 83; Iss. 4
A proton backscattering study of titanium nitride films deposited on a stainless steel substrate by RF sputtering
Koki Tanaka, Yuji Kubo, Neil B. Chilton, Masao KumagaiVolume:
83
Year:
1993
Language:
english
Pages:
8
DOI:
10.1016/0168-583x(93)95882-6
File:
PDF, 668 KB
english, 1993