Threshold energy for sputtering and its dependence on angle...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1993 Vol. 83; Iss. 1-2

Threshold energy for sputtering and its dependence on angle of incidence

W. Eckstein, C. Garciá-Rosales, J. Roth, J. László
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Volume:
83
Year:
1993
Language:
english
Pages:
15
DOI:
10.1016/0168-583x(93)95913-p
File:
PDF, 1.18 MB
english, 1993
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