Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 83; Iss. 1-2
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Sequential ion beam synthesis of buried Si3N4 layers in silicon
A.B. Danilin, K.A. Drakin, A.A. Malinin, V.N. Mordkovich, A.F. Petrov, V.V. Saraikin, O.I. VyletalinaVolume:
83
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(93)95923-s
File:
PDF, 536 KB
english, 1993