Development of a highly reproducible mixed ion beam...

Development of a highly reproducible mixed ion beam sputtering method for long-lived carbon stripper foils

Muto Hideshi, Oyaizu Michihiro, Isao Sugai, Kawasaki Katsunori, Takahashi Yohsuke, Ishii Yasuyuki, Hirata Takehide, Hattori Toshiyuki
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Volume:
83
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(93)95940-7
File:
PDF, 511 KB
english, 1993
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