Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 74; Iss. 3
Roles of implantation temperature and ion dose rate in ion-beam synthesis of buried Si3N3 layers
G.A. Kachurin, V.D. Akhmetov, I.E. Tyschenko, A.E. PlotnikovVolume:
74
Year:
1993
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(93)95971-7
File:
PDF, 1.15 MB
english, 1993