Penetration of high energy ions in semiconductors through...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1993 Vol. 82; Iss. 3

Penetration of high energy ions in semiconductors through tracks: simulation with transport equations

A.M. Zaitsev, S.A. Fedotov, A.A. Melnikov, F.F. Komarov, W.R. Fahrner, V.S. Varichenko, E.H. te Kaat
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Volume:
82
Year:
1993
Language:
english
Pages:
10
DOI:
10.1016/0168-583x(93)95991-d
File:
PDF, 995 KB
english, 1993
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